"Gas chamber and thermal isolation structure simulation for an integrated ..."

Kaisheng Zhang et al. (2020)

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DOI: 10.1109/NEMS50311.2020.9265577

access: closed

type: Conference or Workshop Paper

metadata version: 2020-12-03

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Kaisheng Zhang, Wenbo Luo, Tao Wang, Jing Yang, Yupeng Yuan, Zuwei Zhang, Yao Shuai, Chuangui Wu, Wanli Zhang:
Gas chamber and thermal isolation structure simulation for an integrated NDIR gas sensor. NEMS 2020: 338-341

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