"Formal description and language of MEMS design."

Xin Zhao, Xin Li, Guizhang Lu (2011)

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DOI: 10.1109/NEMS.2011.6017487

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xin Zhao, Xin Li, Guizhang Lu:
Formal description and language of MEMS design. NEMS 2011: 851-854

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