"Study of a novel bi-stable and easy integrated MEMS ETBS."

Yue Zhao, Wenzhong Lou, Dongguang Li (2012)

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DOI: 10.1109/NEMS.2012.6196769

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yue Zhao, Wenzhong Lou, Dongguang Li:
Study of a novel bi-stable and easy integrated MEMS ETBS. NEMS 2012: 257-260

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