"Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation ..."

SungWon Chung et al. (2018)

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DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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  dblp key:
  - conf/ofc/ChungNP018
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  persistent URL:
  - https://dblp.org/rec/conf/ofc/ChungNP018
SungWon Chung, Makoto Nakai, Edward Preisler, Hossein Hashemi:
Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation in Standard Foundry Bulk Silicon Process. OFC 2018: 1-3

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