"Delayed interferometer based Si-wire WDM demultiplexers fabricated by ..."

Seok-Hwan Jeong et al. (2014)

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DOI: 10.1364/OFC.2014.TH3F.5

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-09

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Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito:
Delayed interferometer based Si-wire WDM demultiplexers fabricated by phase controllable and productive 300-mm wafer-scale ArF-immersion lithography technology. OFC 2014: 1-3

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