"Impact of Optical Lithography Resolution on Silicon Arrayed Waveguide ..."

Jian Wang et al. (2019)

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DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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  dblp key:
  - conf/ofc/WangMSHH19
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  persistent URL:
  - https://dblp.org/rec/conf/ofc/WangMSHH19
Jian Wang, Kenneth A. McGreer, Kevin Schmidt, Madhavi Hegde, Jin Hong:
Impact of Optical Lithography Resolution on Silicon Arrayed Waveguide Grating Performance. OFC 2019: 1-3

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