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"Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using ..."
Qize Zhong et al. (2020)
- Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, Navab Singh:
Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production. OFC 2020: 1-3
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