"Testing the Reliability of 2D MEMS Mirrors by Increasing the Applied ..."

Marlene Schneider, David Brunner, Bernd Deutschmann (2025)

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DOI: 10.1109/PRIME66228.2025.11203520

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-01

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Marlene Schneider, David Brunner, Bernd Deutschmann:
Testing the Reliability of 2D MEMS Mirrors by Increasing the Applied Stress Over Time. PRIME 2025: 1-4

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