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"A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic ..."

Philippe Hélin et al. (2019)

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DOI: 10.23919/PS.2019.8818059

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-21

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Philippe Hélin, Andrea Firrincieli, Ashesh Ray Chaudhuri, Nga P. Pham, Silvia Lenci, Manuel Mannarino, Haris Osman:
A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss. OECC/PSC 2019: 1-3

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