"Experimental Demonstration of Noncontact Nanometer Displacement Sensing by ..."

Xiaoyan Wang, Mitsuki Kondo, Masanori Hanawa (2022)

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DOI: 10.23919/OECC/PSC53152.2022.9849934

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-23

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Xiaoyan Wang, Mitsuki Kondo, Masanori Hanawa:
Experimental Demonstration of Noncontact Nanometer Displacement Sensing by Optical Digital Coherent Detection. OECC/PSC 2022: 1-4

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