"Design of an aerostatic imprint head with off-plane alignment ..."

Chong Du et al. (2012)

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DOI: 10.1109/ROBIO.2012.6491099

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Chong Du, Weihai Chen, Yunjie Wu, Wenjie Chen, Mei Yuan:
Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. ROBIO 2012: 999-1004

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