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"Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer ..."

Yoshiro Fukui, Yusuke Murayama (2023)

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DOI: 10.23919/SICE59929.2023.10354144

access: closed

type: Conference or Workshop Paper

metadata version: 2024-01-25

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Yoshiro Fukui, Yusuke Murayama:
Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction. SICE 2023: 730-735

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