"Detection of dislocation-free state in Dash-necking process of Si crystal ..."

Shiori Ueta et al. (2020)

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type: Conference or Workshop Paper

metadata version: 2020-11-10

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Shiori Ueta, Toru Kurihara, Yuta Saibara, Hideyuki Sato, Pao-Hua Chu:
Detection of dislocation-free state in Dash-necking process of Si crystal growth furnace using the Czochralski Method. SICE 2020: 695-700

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