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"Lithography Hotspots Detection Using Deep Learning."

Vadim Borisov, Jürgen Scheible (2018)

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DOI: 10.1109/SMACD.2018.8434561

access: closed

type: Conference or Workshop Paper

metadata version: 2018-08-28

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  - conf/smacd/BorisovS18
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Vadim Borisov, Jürgen Scheible:
Lithography Hotspots Detection Using Deep Learning. SMACD 2018: 145-148

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