"Feedback control design for cluster tools with wafer residency time ..."

Chulhan Kim, Tae-Eog Lee (2012)

> Home

Details and statistics

DOI: 10.1109/ICSMC.2012.6378261

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-14

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/smc/KimL12a
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/smc/KimL12a
Chulhan Kim, Tae-Eog Lee:
Feedback control design for cluster tools with wafer residency time constraints. SMC 2012: 3063-3068

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.