"A novel failure response policy for single-arm cluster tools with ..."

Yan Qiao et al. (2014)

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DOI: 10.1109/SMC.2014.6973894

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yan Qiao, Naiqi Wu, ChunRong Pan, MengChu Zhou:
A novel failure response policy for single-arm cluster tools with residency time constraints. SMC 2014: 120-126

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