"Clustering Wafer Defect Patterns Within the Semiconductor Industry Based ..."

Christian Weber et al. (2021)

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DOI: 10.1109/SMC52423.2021.9658907

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-08

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Christian Weber, A. Tripuramallu, Peter Czerner, Madjid Fathi:
Clustering Wafer Defect Patterns Within the Semiconductor Industry Based on Wafer Maps, Using an Agile Unsupervised Deep Learning Approach. SMC 2021: 1913-1918

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