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"High Sensitivity and Power Efficient Heater Structure for Bulk ..."

Rahul Mukherjee, Joydeep Basu, Prasanta Kumar Guha (2021)

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DOI: 10.1109/VDAT53777.2021.9601046

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Rahul Mukherjee, Joydeep Basu, Prasanta Kumar Guha:
High Sensitivity and Power Efficient Heater Structure for Bulk Micromachined Thermal Accelerometer. VDAT 2021: 1-4

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