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"Stitch-avoiding Detailed Routing for Multiple E-Beam Lithography."

Kritanta Saha, Pritha Banerjee, Susmita Sur-Kolay (2022)

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DOI: 10.1109/VLSI-SOC54400.2022.9939588

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-02

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  dblp key:
  - conf/vlsi/SahaBS22
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Kritanta Saha, Pritha Banerjee, Susmita Sur-Kolay:
Stitch-avoiding Detailed Routing for Multiple E-Beam Lithography. VLSI-SoC 2022: 1-6

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