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"Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs."
Pai-Ying Liao et al. (2022)
- Pai-Ying Liao, Sami Alajlouni, Mengwei Si, Zhuocheng Zhang, Zehao Lin, Jinhyun Noh, Calista Wilk, Ali Shakouri, Peide D. Ye:
Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs. VLSI Technology and Circuits 2022: 322-323
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