"Optimal scheduling of time-constrained single-arm cluster tools with wafer ..."

Zicheng Liu et al. (2016)

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DOI: 10.1109/WODES.2016.7497872

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type: Conference or Workshop Paper

metadata version: 2025-11-08

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Zicheng Liu, Naiqi Wu, FaJun Yang, Yan Qiao:
Optimal scheduling of time-constrained single-arm cluster tools with wafer revisiting. WODES 2016: 355-360

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