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"Aggregate modeling of semiconductor equipment using effective process times."

L. F. P. Etman et al. (2011)

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DOI: 10.1109/WSC.2011.6147894

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  - https://dblp.org/rec/conf/wsc/EtmanVLAR11
L. F. P. Etman, C. P. L. Veeger, Erjen Lefeber, Ivo J. B. F. Adan, Jacobus E. Rooda:
Aggregate modeling of semiconductor equipment using effective process times. WSC 2011: 1795-1807

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