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"Influence of Spare Parts Service Measures on the Performance of Front-End ..."
Douniel Lamghari-Idrissi et al. (2019)
- Douniel Lamghari-Idrissi, Daniel Soellaart, Rob J. I. Basten, Nico P. Dellaert:
Influence of Spare Parts Service Measures on the Performance of Front-End Wafer Production Process. WSC 2019: 2269-2280
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