"Challenges and solution approaches for the online simulation of ..."

Daniel Noack et al. (2011)

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DOI: 10.1109/WSC.2011.6147898

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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Daniel Noack, Marcin Mosinski, Oliver Rose, Peter Lendermann, Boon-Ping Gan, Wolfgang Scholl:
Challenges and solution approaches for the online simulation of semiconductor wafer fabs. WSC 2011: 1845-1856

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