"Towards realization of a high-fidelity simulation model for short-term ..."

Wolfgang Scholl et al. (2010)

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DOI: 10.1109/WSC.2010.5678952

access: closed

type: Conference or Workshop Paper

metadata version: 2025-08-05

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Wolfgang Scholl, Boon-Ping Gan, Ming Li Peh, Peter Lendermann, Daniel Noack, Oliver Rose, Patrick Preuss:
Towards realization of a high-fidelity simulation model for short-term horizon forecasting in wafer fabrication facilities. WSC 2010: 2563-2574

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