"Process equipment modeling: application of cluster tool modeling to a 300 ..."

Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair (2003)

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DOI: 10.1109/WSC.2003.1261581

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair:
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. WSC 2003: 1394-1375

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