"Simulation-based optimization for groups of cluster tools in semiconductor ..."

Tobias Uhlig, Oliver Rose (2011)

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DOI: 10.1109/WSC.2011.6147899

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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Tobias Uhlig, Oliver Rose:
Simulation-based optimization for groups of cluster tools in semiconductor manufacturing using simulated annealing. WSC 2011: 1857-1868

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