"Atomic Layer Deposition and Etching Process Schemas Extracted with ..."

Sameer Sadruddin et al. (2025)

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DOI: 10.5281/ZENODO.16413856

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type: Data or Artifact

metadata version: 2025-11-10

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Sameer Sadruddin, Jennifer D'Souza, Eleni Poupaki, Alex Watkins, Hamed Babaei Giglou, Anisa Rula, Bora Karasulu, Sören Auer, Adriaan Mackus, Wilhelmus Kessels:
Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner. Multiple versions. Zenodo, 2025

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