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"Characterization of Nitride Passivated Cu Surface for Low-Temperature ..."

Hae-Sung Park, Han Kyeol Seo, Sarah Eunkyung Kim (2019)

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DOI: 10.1109/3DIC48104.2019.9058774

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-19

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  dblp key:
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Hae-Sung Park, Han Kyeol Seo, Sarah Eunkyung Kim:
Characterization of Nitride Passivated Cu Surface for Low-Temperature Cu-Cu Bonding. 3DIC 2019: 1-4

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