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"Nonlinear robust stage control of atomic force microscope."

Takashi Nakakuki, Makoto Ogawa, Chiharu Ishii (2012)

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DOI: 10.1109/CCA.2012.6402658

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Takashi Nakakuki, Makoto Ogawa, Chiharu Ishii:
Nonlinear robust stage control of atomic force microscope. CCA 2012: 539-544

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