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"3D resist modeling for OPC correction and verification."

Liang Zhu et al. (2015)

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DOI: 10.1109/ASICON.2015.7517066

access: closed

type: Conference or Workshop Paper

metadata version: 2018-07-17

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  dblp key:
  - conf/asicon/ZhuRTA15
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  - https://dblp.org/rec/conf/asicon/ZhuRTA15
Liang Zhu, Qian Ren, Neo Tan, Zhibo Ai:
3D resist modeling for OPC correction and verification. ASICON 2015: 1-4

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