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"Fogging Effect Aware Placement in Electron Beam Lithography."

Yu-Chen Huang, Yao-Wen Chang (2017)

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DOI: 10.1145/3061639.3062252

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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  - https://dblp.org/rec/conf/dac/HuangC17
Yu-Chen Huang, Yao-Wen Chang:
Fogging Effect Aware Placement in Electron Beam Lithography. DAC 2017: 53:1-53:6

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