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"A novel Bayesian network-based fault prognostic method for semiconductor ..."

Guodong Wang et al. (2017)

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DOI: 10.1109/ICIT.2017.7915579

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-14

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  dblp key:
  - conf/icit2/WangHZG17
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Guodong Wang, Ramin M. Hasani, Yungang Zhu, Radu Grosu:
A novel Bayesian network-based fault prognostic method for semiconductor manufacturing process. ICIT 2017: 1450-1454

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