Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"A Designer's Guide to Subresolution Lithography: Enabling the Impossible ..."

Lars Liebmann, J. Andres Torres (2013)

> Home

Details and statistics

DOI: 10.1109/MDAT.2013.2255911

access: closed

type: Journal Article

metadata version: 2020-03-13

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/dt/LiebmannT13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/dt/LiebmannT13
Lars Liebmann, J. Andres Torres:
A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]. IEEE Des. Test 30(3): 70-92 (2013)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.