"Fabrication and characterization of silicon-based microsensors for ..."

Kyu-Chung Lee, Chang-Wu Hur (2008)

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DOI: —

access: open

type: Journal Article

metadata version: 2021-02-16

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Kyu-Chung Lee, Chang-Wu Hur:
Fabrication and characterization of silicon-based microsensors for detecting offensive gases. J. Inform. and Commun. Convergence Engineering 6(1): 38-42 (2008)

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