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"IR confocal laser microscopy for MEMS Technological Evaluation."

Djemel Lellouchi et al. (2002)

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DOI: 10.1016/S0026-2714(02)00237-8

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/LellouchiBTPD02
Djemel Lellouchi, Felix Beaudoin, Christophe Le Touze, Philippe Perdu, Romain Desplats:
IR confocal laser microscopy for MEMS Technological Evaluation. Microelectron. Reliab. 42(9-11): 1815-1817 (2002)

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