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"Facile chemical method of etching polyimide films for failure analysis ..."

Chien-Pan Liu et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.01.022

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chien-Pan Liu, Jeng-Yu Lin, Yen-Fu Liu, Shoou-Jinn Chang:
Facile chemical method of etching polyimide films for failure analysis (FA) applications and its etching mechanism studies. Microelectron. Reliab. 54(5): 911-920 (2014)

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