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"Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor ..."

Changbao Wen et al. (2018)

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DOI: 10.3390/S18103384

access: open

type: Journal Article

metadata version: 2020-05-30

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  dblp key:
  - journals/sensors/WenNMGR18
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  - https://dblp.org/rec/journals/sensors/WenNMGR18
Changbao Wen, Taotao Niu, Yue Ma, Nan Gao, Feng Ru:
Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering. Sensors 18(10): 3384 (2018)

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