"Methodic errors of microelectromechanical pressure sensors in isotropic ..."

Alexander R. Bestugin et al. (2015)

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DOI: 10.1134/S0005117915120140

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type: Journal Article

metadata version: 2020-07-03

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Alexander R. Bestugin, Irina A. Kirshina, P. A. Okin, Oleg M. Filonov:
Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon. Autom. Remote. Control. 76(12): 2249-2254 (2015)

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