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"Combined Feedforward Control and Disturbance Rejection Control Design for ..."
Mingsheng Cao, Yumeng Bo, Huibin Gao (2020)
- Mingsheng Cao
, Yumeng Bo, Huibin Gao:
Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning. IEEE Access 8: 181224-181232 (2020)
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