"Supervised Multivariate Kernel Density Estimation for Enhanced Plasma ..."

Jungyu Choi et al. (2022)

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DOI: 10.1109/ACCESS.2022.3155513

access: open

type: Journal Article

metadata version: 2022-04-01

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Jungyu Choi, Bobae Kim, Sungbin Im, Geonwook Yoo:
Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection. IEEE Access 10: 25580-25590 (2022)

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