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"Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster ..."
Yanjun Lu et al. (2021)
- Yanjun Lu, Yan Qiao
, ChunRong Pan, Yufeng Chen, Naiqi Wu
, Zhiwu Li, Bin Liu:
Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net. IEEE Access 9: 70868-70883 (2021)
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