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"Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered ..."

Eustaquio Martínez-Cisneros et al. (2021)

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DOI: 10.1109/ACCESS.2021.3084600

access: open

type: Journal Article

metadata version: 2023-06-09

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Eustaquio Martínez-Cisneros, Luis A. Velosa-Moncada, Ernesto Alberto Elvira Hernández, Omar Isaac Nava-Galindo, Luz Antonio Aguilera-Cortés, René Pérez-Cuapio, Arxel de León, Francisco López-Huerta, Rolando Salgado, Agustín Leobardo Herrera-May:
Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters. IEEE Access 9: 81040-81056 (2021)

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