"Optimization and Validation of Wafer Surface Defect Detection Algorithm ..."

Ao Xu et al. (2025)

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DOI: 10.1109/ACCESS.2025.3543525

access: open

type: Journal Article

metadata version: 2025-04-08

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Ao Xu, Yanwei Li, Hongbo Xie, Rui Yang, Jianjie Li, Jiaying Wang:
Optimization and Validation of Wafer Surface Defect Detection Algorithm Based on RT-DETR. IEEE Access 13: 39727-39737 (2025)

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