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"Quantitative Evaluation of Line-Edge Roughness in Various FinFET ..."

Sangho Yu et al. (2022)

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DOI: 10.1109/ACCESS.2022.3156118

access: open

type: Journal Article

metadata version: 2022-04-01

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Sangho Yu, Sang Min Won, Hyoung Won Baac, Donghee Son, Changhwan Shin:
Quantitative Evaluation of Line-Edge Roughness in Various FinFET Structures: Bayesian Neural Network With Automatic Model Selection. IEEE Access 10: 26340-26346 (2022)

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