"Machine Learning-Enhanced Model-Based Optical Proximity Correction by ..."

Jinhao Zhu et al. (2024)

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DOI: 10.1109/ACCESS.2024.3517875

access: open

type: Journal Article

metadata version: 2025-01-08

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Jinhao Zhu, Zhiwei Ren, Ying Li, Xianhe Liu, Qiang Wu, Yanli Li, Qi Wang:
Machine Learning-Enhanced Model-Based Optical Proximity Correction by Using Convolutional Neural Network-Based Variable Threshold Method. IEEE Access 12: 191517-191526 (2024)

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