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"Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed ..."

Qinghua Zhu et al. (2016)

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DOI: 10.1109/ACCESS.2016.2549546

access: open

type: Journal Article

metadata version: 2021-02-04

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Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou:
Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets. IEEE Access 4: 2096-2109 (2016)

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