"Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance."

Yu Zihao et al. (2023)

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DOI: 10.1109/ACCESS.2023.3311139

access: open

type: Journal Article

metadata version: 2024-10-06

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Yu Zihao, Lihao Wang, Yang Wang, Zhang Yonggui, Yichen Liu, Zhenyu Wu:
Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance. IEEE Access 11: 95307-95314 (2023)

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