"Defective wafer detection using a denoising autoencoder for semiconductor ..."

Shu-Kai S. Fan et al. (2020)

> Home

Details and statistics

DOI: 10.1016/J.AEI.2020.101166

access: closed

type: Journal Article

metadata version: 2020-12-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/aei/FanHJCJ20
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/aei/FanHJCJ20
Shu-Kai S. Fan, Chia-Yu Hsu, Chih-Hung Jen, Kuan-Lung Chen, Li-Ting Juan:
Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes. Adv. Eng. Informatics 46: 101166 (2020)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.