"A Copula network deconvolution-based direct correlation disentangling ..."

Hongwei Xu et al. (2024)

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DOI: 10.1016/J.AEI.2023.102272

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type: Journal Article

metadata version: 2024-03-29

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Hongwei Xu, Wei Qin, Jinhua Hu, Yan-Ning Sun, Youlong Lv, Jie Zhang:
A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication. Adv. Eng. Informatics 59: 102272 (2024)

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